Fluoropolymers meet stringent standards for chemical and temperature resistance demanded for wafer processing equipment, cleaning tools and wet benches. Halar® ECTFE is widely used as a structural material as well as in coatings for clean room exhaust duct systems. Solef® PVDF, extruded or molded, is found in fittings, valves and various components as well as in processing equipment.  Hyflon® PFA fully fluorinated polymers deliver exceptional corrosion resistance and purity for components and coatings.

Galden® PFPE fluids are widely used as heat transfer media in IC manufacturing tools such as dry etchers, ion implanters, lithography steppers, and chemical vapor deposition (CVD). Fomblin® PFPE lubricants are ideal for use as vacuum pump oils in wafer manufacturing processing such as dry etching and CVD.

Critical sealing made from Tecnoflon® FKM and FFKM ensure process reliability and long service life.

Materials

Galden® PFPE
Halar® ECTFE
Halar® ECTFE Coating
Solef® PVDF
Tecnoflon® FKM and FFKM

Heat transfer fluids

The main purpose of a process cooling fluid is to control or maintain the constant temperature of the wafer to a certain set point in order to avoid potential material damage.

Galden® PFPE HT is a line of heat transfer fluids with boiling points ranging from 55°C to 270°C. Their excellent dielectric properties, high chemical stability combined with their capacity to operate at very low as well as elevated temperatures make them the best heat transfer fluids for the aggressive conditions used in the Semiconductor and Electronic Industry.

Galden® PFPE HT fluids show excellent compatibility with most of the materials commonly present in heat exchangers. Galden® PFPE systems are practically maintenance-free with no corrosion hazard. Galden® PFPE dielectric properties do not change with use with no risk of short circuiting. Environmentally safe, Galden® PFPE is non-toxic, non-explosive, and will not damage electronics should any leakage occur. No Flash or Fire Point and No Auto-ignition Point are additional advantages of Galden® PFPE HT.

Thin films or coatings for microlithography

Hyflon® AD amorphous perfluoropolymers can provide uniform and thin films or coatings down to submicron thicknesses for solution process technologies. Important characteristics for microlithography applications include:

• High temperature stability
• Good chemical resistance
• Excellent hydrophobicity
• Very low surface energy
• Low dielectric constant
• Very high gas permeability and selectivity
• Outstanding optical properties (i.e. high UV transmittance, low refractive index)

Fomblin® PFPE fluorinated fluids are:

• Thermally stable
• Chemically inert
• Non-flammable
• Non-toxic
• Compatible with metals, hydrogenated polymers, oxygen and aggressive gases even at very high temperatures.

They have low vapor pressure and good dielectrical properties.

When critical applications have to be addressed, where aggressive chemical environments, high temperatures or wide working-temperature ranges are involved, they represent the lubricants of choice. Fomblin® PFPE Y LVAC and Y HVAC grades are ideal for use in vacuum pumps as sealing and working fluids especially in those systems exposed to aggressive gases. Fomblin® PFPE Y HVAC combines narrow molecular weight range and controlled viscosity with an extremely low vapor pressure.

Chemical inertness, thermal stability above 290°C and the possibility to provide anti-rust and wear additivation make the Fomblin® PFPE VAC product line ideal for lubrication of vacuum pumps in harsh environment including wafer processing.

Spire® Ultra Polymers for Semiconductor Applications

Our family of Spire® Ultra Polymers offers a combination of superlative performance properties, including high strength and stiffness at elevated temperature, dimensional stability, and resistance to chemicals, fatigue and wear, as well as compatibility with high-temperature processing.

These ultra-performance plastics can be used throughout the semiconductor industry where dimensional stability, wear resistance, chemical resistance, and high temperature processing are required. High strength and stiffness plus long-life performance makes them an effective alternative to metal components in wafer handling, processing vessels, parts carriers, and IC test equipment sockets and handlers.

These materials are also available in stock shapes that are readily machined to tight tolerances.

Typical Applications

• Wafer transport system components
• Processing vessels and components
• CMP rings
• Diamond polishing pads

AvaSpire® polyaryletherketone (PAEK) – Versatile family of products tailored to provide new and unique combinations of performance and value.

KetaSpire® polyetheretherketone (PEEK) – An industry standard with proven performance. It offers outstanding chemical resistance and mechanical properties up to 250°C along with low particle generation, low outgassing and best-in-class fatigue resistance.

Torlon® polyamide-imide (PAI) – Combines exceptional wear resistance with high strength and stiffness up to 275°C as well as excellent resistance to creep, abrasion and chemicals. It has low thermal expansion and high dielectric properties, and is more cost-effective than machined thermoset polyimides.

Typical Properties of Wear-Resistant Grades

• Torlon® PAI Grades
• KetaSpire® PEEK & AvaSpire® PAEK Grades