The transfer of wastes in the semiconductor manufacturing environment concerns the transportation of chemicals, gases, slurries and other liquids from the manufacturing operations to facilities where they may be collected, pretreated, recycled or otherwise disposed of.
The substances considered waste products of semiconductor manufacturing are likely to be corrosive, ignitable, reactive and/or toxic. Fluoropolymers offer superior strength and resistance to acids used in the etch, stripping and cleaning processes, as well as abrasion resistance to slurries and effluents. Piping and fittings, valves and other components made or coated by Solef® PVDF, Halar® ECTFE, Hyflon® PFA and Algoflon® PTFE offer reliable construction for waste disposal systems.
Materials
Algoflon® PTFE
Solef® PVDF
Halar® ECTFE
Halar® ECTFE Coating
Hyflon® PFA
Hyflon® PFA/MFA® Coating